The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
对投影型微光学编码器的原理进行了分析,结合微机电系统集成技术,提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
对投影型微光学编码器的原理进行了分析,结合微机电系统集成技术,提出并实现了投影型微光学编码器。
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