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It consists of the main pumping system, pumping divertor and glow discharge cleaning (GDC) system.
它由真空主抽气系统、抽气偏滤器、直流辉光放电清洗系统组成。
youdao
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It consists of the main pumping system, pumping divertor and glow discharge cleaning (GDC) system.
它由真空主抽气系统、抽气偏滤器、直流辉光放电清洗系统组成。
youdao