The invention belongs to the technical field of semiconductor devices, in particular to a novel ferroelectric condenser for storing high density charge and method for preparation.
本发明属于半导体器件技术领域,具体为一种高密度电荷存储的新型铁电电容器及其制作方法。
The invention belongs to the technical field of semiconductor devices, in particular to a novel ferroelectric condenser for storing high density charge and method for preparation.
本发明属于半导体器件技术领域,具体为一种高密度电荷存储的新型铁电电容器及其制作方法。
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