The goal of this paper is to design and implement a system that use automation feedback control solution to improve the automation integration in semiconductor Etch area.
本文的研究目标是实现在半导体蚀刻区通过自动化反馈控制系统来提高生产的自动化程度。
The goal of this paper is to design and implement a system that use automation feedback control solution to improve the automation integration in semiconductor Etch area.
本文的研究目标是实现在半导体蚀刻区通过自动化反馈控制系统来提高生产的自动化程度。
应用推荐