The density and contact effect of the film were improved by the introduction of a transitory high temperature treatment ahead of epitaxial growth.
提出一种在生长温区前进行短暂熔融处理的工艺手段,提高了薄膜的致密性和浸润效果。
The density and contact effect of the film were improved by the introduction of a transitory high temperature treatment ahead of epitaxial growth.
提出一种在生长温区前进行短暂熔融处理的工艺手段,提高了薄膜的致密性和浸润效果。
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