A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.

介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。

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A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.

介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。

youdao