The depth profile distribution of Ag closes to Gauss Distribution, and its peak moves to the surface of the film with the increase of Ag doped dose.
注入的银离子在薄膜中呈近高斯分布，分布峰随注入剂量的增加而向表层移动。
The depth profile distribution of Ag closes to Gauss Distribution, and its peak moves to the surface of the film with the increase of Ag doped dose.
注入的银离子在薄膜中呈近高斯分布，分布峰随注入剂量的增加而向表层移动。
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