利用原子力显微镜、二次离子质谱分析仪和探针，对多晶硅薄膜的高温退火特性进行了实验研究。
An experiment was conducted to study the high-temperature annealing characteristics of polysilicon films using atomic force microscope, secondary ion mass spectroscopy and probe.
最后，采用PC1D电池模拟软件对高温路线制备的多晶硅薄膜电池进行了理论模拟。
At last, we use the PC1D program to simulate polycrystalline silicon thin film solar cells prepared under high temperature.
列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法，并分别讨论了它们的原理及特点。
Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
在应用最为广泛的多晶硅太阳能产品生产流程中，原材料先在高温熔炉中熔化，然后通过晶化工艺形成硅锭。
In the most widely used crystalline silicon-based solar manufacturing process, feedstock is melted in high temperature furnaces and then formed into ingots through a crystallization process.
在应用最为广泛的多晶硅太阳能产品生产流程中，原材料先在高温熔炉中熔化，然后通过晶化工艺形成硅锭。
In the most widely used crystalline silicon-based solar manufacturing process, feedstock is melted in high temperature furnaces and then formed into ingots through a crystallization process.
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