本文介绍一种利用长焦距显微镜观察玻璃薄片由镀膜淀积引起的形变来测量薄膜应力的方法。
This paper introduces a method for the measurement of stress of thin film. In this method a long focal distance microscope is used and deformation of the thin film on thin glass sheet is observed.
本文介绍一种利用长焦距显微镜观察玻璃薄片由镀膜淀积引起的形变来测量薄膜应力的方法。
This paper introduces a method for the measurement of stress of thin film. In this method a long focal distance microscope is used and deformation of the thin film on thin glass sheet is observed.
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