输入埠在NVR系统之中无法控制，是因为他必须由所连接之装置或电路加以控制，例如开关、感应器等等。
Input ports cannot be controlled in the NVR system. They are connected to physical input devices such as switches, sensors... etc.
本发明是有关于一种用于半导体制造的系统，至少包含一制程工具，一缓冲器，一输入负载埠，一输出负载埠，与一轨径模组。
The invention relates to a system for semiconductor manufacture, comprising at least a processing tool, a buffer, an input load port, an output load port and a track diameter module.
本发明是有关于一种用于半导体制造的系统，至少包含一制程工具，一缓冲器，一输入负载埠，一输出负载埠，与一轨径模组。
The invention relates to a system for semiconductor manufacture, comprising at least a processing tool, a buffer, an input load port, an output load port and a track diameter module.
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