主要论述硅谐振微传感器中微现象测量。
Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
对一种硅谐振式压力微传感器敏感结构的边界结构参数进行了优化设计。
The boundary structural parameters of a silicon resonant pressure microsensor are optimized in this paper.
本文中的电压传感器采用电阻分压，可将初级电压直接转化为10v以内的微信号，以供测量保护用，装置具有体积小、传输频带宽、不存在饱和问题、无谐振点等优点。
By adopting resistance divider, the voltage sensor designed in this paper can transform primary voltage into micro-signal less than 10v, which can be used in measurement system directly.
研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计，利用ANSYS软件对微差动电容的结构进行了优化设计。
A micro differential capacitance and a micro harmonic oscillator are studied and designed. The structure of the micro differential capacitance is optimized by use of the ANSYS software.
为了提高谐振式微加速度传感器的灵敏度，提出一种新颖的微杠杆结构。
To enhance the sensitivity of resonant microaccelerom et er, a novel microleverage structure has been proposed.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
基于MEMS技术的硅微谐振式压力传感器是目前精度最高的硅微压力传感器，它通过检测物体的固有频率间接测量压力，为准数字信号输出。
Miniature silicon resonant pressure sensor based on MEMS, which has the highest precision for frequency output, measures pressure by detecting the natural frequency of some object.
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