借助台阶仪、X射线衍射(XRD)、扫描电镜(sem)等手段对颗粒硅带及多晶硅薄膜进行了表面轮廓、结晶质量和微观形貌的表征。
The surface profiles, micro-morphologies and crystal quality of SSP ribbon and Poly-Si film were then investigated by the step profiler, XRD (X-ray Diffraction) and SEM (Scanning Electron Microscopy).
借助台阶仪、X射线衍射(XRD)、扫描电镜(sem)等手段对颗粒硅带及多晶硅薄膜进行了表面轮廓、结晶质量和微观形貌的表征。
The surface profiles, micro-morphologies and crystal quality of SSP ribbon and Poly-Si film were then investigated by the step profiler, XRD (X-ray Diffraction) and SEM (Scanning Electron Microscopy).
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