本论文针对热光可调谐光学薄膜滤波器的结构设计和非晶硅薄膜的PECVD制备工艺展开研究。
The research in this paper is mainly about the structural designing of the tunable thin film filter and the processing of amorphous silicon membrane depositing by PECVD.
现在使用的增益均衡器主要有标准光滤波器、介质多层薄膜滤波器以及光纤光栅和平面光波导等。
Common gain equalizers include standard optical filter, medium multi-layer thin film filter, fiber grating, and planar waveguide.
本文基于薄膜干涉滤光片角度调谐的基本原理，首次提出并实现了一种线性调谐光滤波器。
In this paper, a new linear tuning filter based on the angle-tuned thin-film interference filter is design for the first time.
从严格数值结果与近似公式的对比发现，对共振滤波器的旁带反射率，可以用普通薄膜光学的反射率公式进行非常直观方便的讨论。
Comparing rigorous numerical result with approximate formulae, we find that the reflectance formula of general thin optics can easy straight calculate the side bands reflectance of resonance filter.
提出一种基于集成电路超微细加工技术制造电磁干扰滤波器的薄膜集成制造新技术。
A new technique for fabricating EMIF in thin film IC based on superfine processing technique is proposed.
目前主要滤波技术有薄膜干涉滤波器、阵列波导光栅(awg)和光纤布拉格光栅(FBG)。
At the present time, the mainstream optical filter techniques including dielectric thin-film filter, array waveguide (AWG), Fabry-Perot (F-P) filter, fiber Bragg grating (FBG).
目前主要滤波技术有薄膜干涉滤波器、阵列波导光栅(awg)和光纤布拉格光栅(FBG)。
At the present time, the mainstream optical filter techniques including dielectric thin-film filter, array waveguide (AWG), Fabry-Perot (F-P) filter, fiber Bragg grating (FBG).
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