对于外延层必须达到的工艺参数，提出了一系列减小或抑制外延过程中扩散效应和自掺杂效应的工艺措施和方案，使外延层质量有了明显的提高；
For the parameter of the epitaxial layer, putting forward a series of measures that let up or repress deposition and self-doping when the epilayer processing, improve the epilayer quality.
预料其它对折射率的影响来自掺杂剂以及电光效应。
Additional contributions to the refractive index are expected to come from the dopant(6. 8)as well as from the electro-optic effect.
预料其它对折射率的影响来自掺杂剂以及电光效应。
Additional contributions to the refractive index are expected to come from the dopant(6. 8)as well as from the electro-optic effect.
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