最后,利用上述光学成像技术,实现了一种光学自动对准系统。
The final step, an optical automatic alignment system is completed by using the optical imaging system.
结果表明,该光学自动对准系统具有结构紧凑、成本低、精度高等特点。
The results of an example show that the optical automatic alignment system is featured by compact construction, lower costs, and higher precision and so on.
基于高精度自动对准系统中的视觉定位系统,对定位标识图像进行系列的图像处理算法研究和技术处理。
A vision automatic alignment system comprises an optical lighting system, an optical imaging system, image processing software, a control system and so on.
为了解决光器件生产中的效率问题,研制了自动光纤对准系统。
For improving the efficiency on the optical part production, the auto optical fiber align system is researched.
提出了用于提高X射线光刻对准系统自动对准效率和对准精度的图像边缘增强技术,并进行了数值分析。
The image edge-enhanced technique was proposed to improve the automatic aligning efficiency and aligning accuracy in the X-ray lithography aligning system, and the numerical analysis was given.
提出了用于提高X射线光刻对准系统自动对准效率和对准精度的图像边缘增强技术,并进行了数值分析。
The image edge-enhanced technique was proposed to improve the automatic aligning efficiency and aligning accuracy in the X-ray lithography aligning system, and the numerical analysis was given.
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