本文的研究目标是实现在半导体蚀刻区通过自动化反馈控制系统来提高生产的自动化程度。
The goal of this paper is to design and implement a system that use automation feedback control solution to improve the automation integration in semiconductor Etch area.
使用反馈线性化与改进的模糊控制方法设计飞机纵向自动着陆控制系统。
The control system for longitudinal automatic landing of an aircraft was designed with the methods of feedback linearization and improved fuzzy control.
目前，国际上主流的自动化控制系统都采用PLC进行控制及数据的采集与反馈。
At present, the international mainstream of the automatic control system USES PLC control and data collection and feedback.
目前，国际上主流的自动化控制系统都采用PLC进行控制及数据的采集与反馈。
At present, the international mainstream of the automatic control system USES PLC control and data collection and feedback.
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