• 等离子电子碰撞频率磁感应强度调节等离子反射率重要参量

    The electronic collisional frequency and magnetic inductive intensity are important parameters of plasma for adjusting the reflectance.

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  • 金属等离子光源相比由于使用气体等离子体光源,反射率具有低碎屑长期连续运行等优点。

    In comparison with metal target LPP source, due to usage of gas-jet target LPP source, the reflectometer is debris-free and can continuously operate for a long time.

    youdao

  • 金属等离子光源相比由于使用气体等离子体光源,反射率具有低碎屑长期连续运行等优点。

    In comparison with metal target LPP source, due to usage of gas-jet target LPP source, the reflectometer is debris-free and can continuously operate for a long time.

    youdao

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