进行第二次退火以便将通过第一次退火的两次热循环形成的富金属硅化物相转化成处于其最低电阻相的金属硅化物(68)相。
A second anneal is performed to convert the metal rich silicide phase formed by the two thermal cycles of the first anneal into a metal silicide (68) phase that is in its lowest resistance phase.
进行第二次退火以便将通过第一次退火的两次热循环形成的富金属硅化物相转化成处于其最低电阻相的金属硅化物(68)相。
A second anneal is performed to convert the metal rich silicide phase formed by the two thermal cycles of the first anneal into a metal silicide (68) phase that is in its lowest resistance phase.
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