其次，分析了硅微陀螺仪的主要误差源。
Secondly, the main errors of silicon micromachined gyros are analyzed.
介绍了一种新的硅微陀螺仪闭环驱动方案。
A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed.
研究了硅微陀螺仪机械耦合误差的产生机理。
The mechanism of mechanical coupling errors of silicon microgyroscopes was studied.
目前，国内对硅微陀螺仪的研究主要集中在提高精度和稳定性。
Presently, researches on silicon micromachined gyros focus on how to enhance the accuracy and stability mainly.
静电梳齿微驱动器因其结构简单、功耗低、灵敏度高、受温度影响小，成为硅微陀螺仪的主要驱动方式。
Silicon micromachined gyroscope is mainly driven by electrostatic comb-finger actuator which has advantages of simple structure, low power supply, high sensitivity and not susceptible to temperature.
以单自由度硅微振动轮式陀螺仪的检测动极板为控制对象，系统的结构特性决定了只能选择反馈控制方式对其进行控制。
The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass, because of system structure, feedback control is the only choice to control the proof mass.
研究了基于自适应控制的硅微振动陀螺仪的驱动电路设计，通过固定频率信号驱动和自适应调谐实现双驱动模态的一致性。
The drive circuitry of the silicon micromachined gyroscope based on adaptive control is investigated. The coherence of two vibratory modes is achieved utilizing adaptive tuning at a given frequency.
硅微振动陀螺仪驱动模态的稳定性对其性能及可靠性有着重要作用。
Driving stability of the micromachined vibratory gyroscope is of critical importance in its performance and reliability.
硅微振动陀螺仪驱动模态的稳定性对其性能及可靠性有着重要作用。
Driving stability of the micromachined vibratory gyroscope is of critical importance in its performance and reliability.
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