提出了一种具有自由悬浮敏感膜和带孔铜底板的硅微机械电容式麦克风。
A micromachined condenser microphone with a free floating sensing diaphragm and a perforated thick copper backplate is presented.
提出了一种具有自由悬浮敏感膜和带孔铜底板的硅微机械电容式麦克风。
A micromachined condenser microphone with a free floating sensing diaphragm and a perforated thick copper backplate is presented.
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