基于常规CMOS硅加工工艺的反射技术为投影显示展现了良好的前程。
Reflective technology based on standard silicon CMOS processing has emerged as a favorable direction for projection displays.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
用表面硅微加工工艺研制了一种用于薄膜热容测量的新型微桥量热计。
A micro bridge calorimeter fabricated with silicon surface micro-fabrication technology is developed for testing heat capacity of thin films.
采用双面对准光刻工艺，各向异性腐蚀微机械加工制硅膜片等新技术。
Some new techniques are adopted, for example, technology of dual-face alignmental silicon etching and anisotropic corrosion (micromachine), etc.
硅片键合往往与表面硅加工和体硅加工相结合，用在MEMS的加工工艺中。
The silicon bonding technology is generally combined with surface silicon machining and bulk silicon machining in MEMS.
提出了一种基于北京大学硅玻璃键合深刻蚀释放工艺的扩展工艺，用来加工微型隧道加速度计。
A tunneling accelerometer is fabricated and characterized based on the extension of the silicon-glass anodic-bonding and deep etching releasing process provided by Peking University.
以与IC兼容的硅作为基底材料，利用MEMS加工工艺，采用硅腐蚀及SU8微反应池方法制成了新型微电极传感器。
Using IC-compatible silicon as substrate and MEMS processing technology, it is fabricated with silicon wet etching and SU8 micro reaction pool.
针对铝合金元素硅的特点，结合生产实际和目前国内外先进技术，对元素硅的添加工艺进行了探讨。
According to the production practice and advanced technology at home and abroad, alloying process of Si element is discussed in respect of Si characteristic in aluminium alloy.
介绍了旋转载体用硅微机械陀螺敏感元件的结构和利用双面多次光刻、腐蚀等微机械工艺加工得到硅振动单元的工艺过程。
Using MEMS technics to process the silicon vibration element, in the process two side lithography and etching has being used many times.
表面微加工工艺采用两种晶体硅芯片基板作为赖以建立层的基础，或者可以在更便宜的玻璃或塑料基板启动。
The surface micromachining process uses either crystal silicon chip substrates as a foundation upon which to build layers, or can be started on cheaper glass or plastic substrates.
对单晶硅材料进行电火花加工工艺试验研究的结果表明，在一定的条件下，电火花加工工艺可成为单晶硅材料的一种较有效的加工方法。
An experiment of single crystal silicon EDM have been carried out in this paper. Experimental results show that EDM is a effective machining method to single crystal silicon.
方法采用软刻法制作聚二甲基硅氧烷(PDMS)流动腔，对PD MS流动腔的加工工艺、封装方法和腔内细胞生长进行了探讨。
The methods of fabrication and enclose of PDMS channel and cell culture on the bottom of channel were studied in detail.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
介绍了低碳低硅冷加工用拉丝线材的化学成分、生产工艺设计及新产品开发。
New product development and production design, chemical composition of Q175 cold-drawn wire with the low carbon and low silicon are introduced in this paper.
介绍了低碳低硅冷加工用拉丝线材的化学成分、生产工艺设计及新产品开发。
New product development and production design, chemical composition of Q175 cold-drawn wire with the low carbon and low silicon are introduced in this paper.
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