具体地说，提供用来补偿流动路径和质量流量控制器的压力环境中的压力瞬变现象的方法和系统。
In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
质量流量控制器的性能可能易受在与控制流体流动的控制器耦合的流动路径中的压力瞬变现象的影响。
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow.
质量流量控制器的性能可能易受在与控制流体流动的控制器耦合的流动路径中的压力瞬变现象的影响。
Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow.
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