为满足电磁型平面微电机对定子绕组线圈的高深宽比及厚度要求，提出一种利用AZ 4903光刻胶制作电磁平面微电机定子绕组的方法。
Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotors stator windings.
为满足电磁型平面微电机对定子绕组线圈的高深宽比及厚度要求，提出一种利用AZ 4903光刻胶制作电磁平面微电机定子绕组的方法。
Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotors stator windings.
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