首先，对电浆物理、PECVD设备及制程原理加以阐述。

First of all, plasma physics, PECVD equipment and its process principles are explained.

youdao

首先，对电浆物理、PECVD设备及制程原理加以阐述。

First of all, plasma physics, PECVD equipment and its process principles are explained.

youdao