在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.
在激光直接写入设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。
The optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servo mechanism.
应用推荐