在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
在器件结构上结合了温差式和风速计式两种检测原理，设计并制造了一种新型结构的MEMS热式流量计。
A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.
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