提出用优化成像系统设计参量的方法有效消除基于数字微镜阵列的栅格结构及其衍射对微结构成像质量的影响。
The pixel structure is removed by optimizing the parameters of imaging system rather than other techniques that make the setup of digital photolithography complexity.
提出用优化成像系统设计参量的方法有效消除基于数字微镜阵列的栅格结构及其衍射对微结构成像质量的影响。
The pixel structure is removed by optimizing the parameters of imaging system rather than other techniques that make the setup of digital photolithography complexity.
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