对改良西门子法多晶硅生产中尾气分离工艺进行了改进。
The separation process about deoxidizing stove tail gas in the modified Siemens arts and crafts in polycrystalline silicon production was improved.
本发明多晶硅生产领域，具体涉及改良西门子法中二级三氯氢硅的处理方法。
The invention relates to the field of polysilicon production, in particular to a method for treating secondary trichlorosilane in an improved Siemens method.
本发明多晶硅生产领域，具体涉及改良西门子法中二级三氯氢硅的处理方法。
The invention relates to the field of polysilicon production, in particular to a method for treating secondary trichlorosilane in an improved Siemens method.
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