最后，初步确立了表征碳化硅单晶抛光片质量的测试方法。

Finally, this paper primarily establishes a testing method of characterization silicon carbide wafer quality.

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由于背抛光面对受光面入射光的反射，使得少子产生率和受光面表面光电压都高于单面抛光片。

Because of the reflection on the back surface the minority carrier generation and illuminated surface photovoltage of both sides polished wafer will be higher than one of single side polished wafer.

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采用毛毡抛光片和新的装夹方法加工平面光学零件，可实现中低等精度平面镜古典法高效抛光。

Using new technology to make plane optical parts with felt polishing pads and new flocking method, the plane optical parts with low or medium accuracy can be efficiently polished in the classical way.

youdao

采用毛毡抛光片和新的装夹方法加工平面光学零件，可实现中低等精度平面镜古典法高效抛光。

Using new technology to make plane optical parts with felt polishing pads and new flocking method, the plane optical parts with low or medium accuracy can be efficiently polished in the classical way.

youdao