抛光过程中决定抛光质量的参数有：抛光浆体、抛光温度、抛光时间等。
The parameters deciding the quality in polishing process are as follows: slurry, temperature, wafering time, and so on.
抛光过程中决定抛光质量的参数有：抛光浆体、抛光温度、抛光时间等。
The parameters deciding the quality in polishing process are as follows: slurry, temperature, wafering time, and so on.
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