研究了一种新型结构的光纤悬臂梁式振动传感器。
This paper deals with a novel type of optic fibre cantilever vibration sensor.
本文在分析现有悬臂梁式小力值传感器的基础上，提出一种带有加速度补偿梁的传感器结构。
On he basis of analysis of the original cantilever type transducer measuring smaller force, a transducer structure with acceleration compensating beam is presented.
基于MEMS技术和SOICMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。
This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.
湿度传感器大致可以分为下列几种类型：电容式、电阻式、悬臂梁式、晶振式、以及热电偶式。
Humidity sensors can be categorized into capacitive, resistive, mechanical, oscillating and thermo elemental type based on the sensing principle used.
湿度传感器大致可以分为下列几种类型：电容式、电阻式、悬臂梁式、晶振式、以及热电偶式。
Humidity sensors can be categorized into capacitive, resistive, mechanical, oscillating and thermo elemental type based on the sensing principle used.
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