提出了V型电热硅微致动器的弯曲振动力学模型。
A flexural oscillation model about V-shaped silicon electro-thermal micro actuator is presented.
制作一种新型压电陶瓷微致动器，用于高密度硬盘驱动器磁头的精确定位。
A new piezoelectric ceramic micro-actuator for high-density hard disk drives is proposed and developed.
面向主动流动控制研发了气泡型微致动器及其阵列技术和MEMS合成射流器技术。
Based on MEMS technology, micro balloon actuator arrays and synthetic jets were developed for active control of flow over an airfoil.
文中介绍了MEMS微致动器和各类驱动模式的优缺点，并以微马达为例，详细比较了其执行机制和原理。
This paper introduced characteristic of MEMS micro actuators and all kind of activate pattern. Take for Micro motor example, compare in detail perform patter and principle of Micro actuators.
将嵌入大量微致动器元件的智能蒙皮应用于飞行器，以增强或替代传统的控制面来产生控制力矩，使飞行器稳定并能进行机动飞行。
The smart skin which embedded hundreds of micro effectors was used in an advanced aircraft to generate moments for stabilization and maneuver, by augmenting or replacing conventional control surfaces.
本文就以用于三角翼气动控制的微气泡致动器阵列为对象展开研究。
Micro balloon actuator array for aerodynamic control of delta wing has been explored in this paper.
泳动微机器人是采用微驱动器致动、模仿水生动物游泳的方式推进的新型微机器人。
The swimming micro robot is a new kind of robot which is driven by micro drivers and simulates the aquatic motion mechanism.
根据硅微泵的结构特点，制作出用于微型泵的电磁致动器，并对该电磁致动器进行了分析与振动测试。
A electromagnetic actuator was designed and fabricated to drive silicon micro-pump membrane. Some theoretical analysis and experimental evaluation were made in this paper.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
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