介绍了一种新型的、利用并联梳齿结构驱动的静电型微继电器及其制造工艺。
A novel electrostatic microrelay with parallel-comb drive structure and its fabrication process were presented.
此双稳态机构可与电磁驱动、电热驱动和静电驱动等类型的微驱动器联用构成永磁双稳态MEMS微继电器。
With electromagnetic, electrothermal, and electrostatic micro actuators, this bistable structure can be applied to permanent magnet bistable MEMS relay.
分析结果显示，在本文分析之范围内，微继电器开关之接触弯曲应力、应变以及残留应力、应变均会随著开关间隙、接触力以及电流负载之增加而增加。
The numerical results indicate that the contact stress and strain, and the residual stress and strain increase as either of the switch gap, switch contact force, or electric current loads increase.
些电路的设计者们在设计时都有同样的观念：完整的单一模式集成电路继电器和微功率运放。
The designers of these circuits based them on the same concept: a fully integrated, single-die-IC switching regulator and a micropower operational amplifier.
些电路的设计者们在设计时都有同样的观念：完整的单一模式集成电路继电器和微功率运放。
The designers of these circuits based them on the same concept: a fully integrated, single-die-IC switching regulator and a micropower operational amplifier.
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