介绍了微机电系统当前的进展与发展前景。
提出一种新型的胶囊式药物释放微机电系统的设计模型。
对于微机电系统，更重要的是微细零件的制造和加工。
To MEMS, the important role is the manufacture and process of micro-parts.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
微机电系统； 多粒度宏建模；非标结构；模型降阶；
Micro electro mechanical systems Multi-granularity macro-modeling Non-standard structure Model order reduction;
传感器对被测对象的负荷效应是微机电系统中不可忽视的一个问题。
The loading effect of sensors is often an inevitable problem in micro-electromechanical systems(MEMS).
以及一连接部，连接该应力分散结构及该微机电系统装置的一基板。
The connection part is connected with the stress dispersion structure and a basal plate of the micro-electromechanical system device.
研究微机电系统(MEMS)中微梁结构在非线性电场力下的振动问题。
Vibration of a micro beam structure under the nonlinear electric field force in MEMS is studied.
微执行器是微机电系统的核心部件，应用范围广泛，具有重要的研究价值。
Micro actuator is the kernel part of MEMS, with wide application range and important research value.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
微机电系统；加速度传感器；微结构；刚度；力法；功能原理；
Micro-electro-mechanical system(MEMS); Accelerometers; Microstructure; Stiffness; Force method; Principle of work and strain energy;
微系统工程包括微机电系统(MEMS)及相关设备的设计、制造和封装。
Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
本书介绍的微机电系统和微系统的工程设计方法涉及电气和机械两方面技术。
An engineering design approach to Microelectromechanical systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology.
现有的微机电系统(MEMS)设计中缺乏面向优化的MEMS器件变动方法。
In the design of MEMS device, a main problem is to lack the variation method of orienting optimization.
从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。
The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).
目前，微机电系统(MEMS)作为致动器和传感器已被广泛应用于航空航天领域中。
At present, the Micro-Electro-Mechanical System (MEMS) is widely applied as the actuators and sensors in the aeronautics and astronautics.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
本发明提供一种微机电系统（MEMS）装置800，其包括集成柱和可变形层870。
Provided is a MEMS device 800 comprising an integrated post and deformable layer 870.
微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。
Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
无线传感器网络随着传感器技术、微机电系统、现代网络和无线通信等技术的进步孕育而生。
With the development of sensors technology, Micro-Electro-Mechanism System(MEMS), modern networks and wireless communication technology, wireless sensor network (WSN) comes out and develops gradually.
为了克服粘着对微机电系统装配的影响，提出了一种利用液体桥力实现微球转移操作的方法。
A method is presented to manipulate microspheres using liquid bridge forces to overcome the influence of adhesion during micro-electro-mechanical system assembly.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统，测量了谐振器的振动速度。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
微机电系统和传感器制造商MEMSIC，正计划在其IRIS 传感器上使用 MoteRunner。
MEMSIC, a micro-electromechanical systems and sensor manufacturer, plans to offer Mote Runner on its popular IRIS sensor.
我们继续把我们的能力扩展到还在开发中的市场，例如太阳能，光伏和微机电系统(MEMS)。
We continue to extend our competence to support developing markets such as the solar industry and photovoltaics as well as MEMS.
论述了微机电系统的技术特征、主要技术和加工工艺，并展望了微机电系统在航天器上的应用前景。
This paper presents the technical characteristics, key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed.
论述了微机电系统的技术特征、主要技术和加工工艺，并展望了微机电系统在航天器上的应用前景。
This paper presents the technical characteristics, key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed.
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