采用表面微机械加工技术允许多达近100精细的应用在一个芯片上的电路图案层的应用。
Using surface micromachining techniques allows applications of up to nearly 100 finely applied layers of circuit patterns on one chip.
现代机构学具有广泛的应用前景，可以对可控机构、机器人、微机械、机械动力分析等的深入研究产生影响。
Modern mechanisms has a broad application prospect, it could make great effect on controllable mechanism, robot, micro mechanism, mechanical dynamical analysis, etc.
论文基于MEMS技术的微机械陀螺的研究，对于提高弹道修正的精度和效率具有重要的参考价值和应用前景。
The study of micromachined gyroscope based on MEMS in the paper have important reference value and application foreground in rising ballistic correction's accuracy and efficiency.
多孔硅作为一种牺牲层材料，在表面硅微机械加工技术中有着重要的应用。
Porous silicon used as a sacrificial layer has some important applications in surface micromachining technology.
将谐振原理应用于硅微机械加速度计中，可以改善后者输出信号的质量，降低检测难度。
If resonant elements are adopted in MEMS accelerometer, the quality of the signal output can be improved, and therefore the detection will be easier.
准分子激光在微机械加工，医学，光通讯中具有重要应用。
The excimer laser has important applications in micro-machine process, medicine and optical communication.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
超磁致伸缩材料以其高能量输出、高操作频率、远程非接触式控制等特点广泛应用于各种微机械系统中。
Giant magnetostrictive thin films are very promising for micro-electro-mechanical systems (MEMS) as they combine high energy output, high frequency and remote control operation.
应用计算机辅助设计(CAD)方法模拟设计一种射频微机械(RF - MEMS)开关。
RF MEMS switch is designed by computer aided design (CAD) method.
基于MEMS技术加工的微机械陀螺具有体积小、重量轻、功耗低、可靠性高等优点，当前在许多领域具有非常广阔的应用前景。
Micromachined gyroscope based on MEMS technology has the advantages of small size, light weight, low power consumption, high reliability and so on, and has broad application in many area.
将微机械加工技术应用于传感器研究，制备一体化薄膜生物传感器。
An integrated thin film microbiosensor was developed based on a micromachining techniques.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
微电子机械系统(MEMS)技术加工的微机械陀螺仪具有体积小、重量轻、成本低、容易批量化生产等优点，当前在许多领域具有非常广阔的应用。
Micromachined vibratory gyroscopes processed by MEMS technology have the merit of small size, light weight, low cost, and have a variety of applications in many fields nowadays.
应用推荐