给出一种基于昆虫毛状感触器的微型仿生传感器，用以测量低速气体流动。
A new biomimetic microsensor modeled on trichoid sensillum of insects which can detect low velocity gas flow is demonstrated.
本课题对微型热式气体流量传感器的稳态传热进行了系统研究。
In this dissertation, the steady heat transfer of the micro thermal airflow sensor is systematically studied.
制作微型化的气体传感器是MEMS应用的主要领域之一。半导体气敏传感器，是当前MEMS气敏传感器的主流。
Currently, micro gas sensors have become one of the major MEMS fields, and semiconductor gas sensors are the mainstream.
该传感器敏感膜结构由离散的微型圆柱体单元三维式扩散模型组成，模型上表面和侧面同时接触被测气体，扩大了与被测气体的接触面积。
The structure is made up of cylinder model with three-dimensional diffusion, which upper and side surfaces can meet the gas at the same time to enlarge the area with gas.
该传感器敏感膜结构由离散的微型圆柱体单元三维式扩散模型组成，模型上表面和侧面同时接触被测气体，扩大了与被测气体的接触面积。
The structure is made up of cylinder model with three-dimensional diffusion, which upper and side surfaces can meet the gas at the same time to enlarge the area with gas.
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