在CVD过程中,存在着大的温度差和浓度差,将引发自然对流和浓度扩散,它们又与气体的强迫流动以及反应器的几何尺寸和形状相互影响。
Large temperature and concentration differences taking place in CVD process lead to natural convection and concentration diffusion which interact with forced convection and complex reactor geometries.
在CVD过程中,存在着大的温度差和浓度差,将引发自然对流和浓度扩散,它们又与气体的强迫流动以及反应器的几何尺寸和形状相互影响。
Large temperature and concentration differences taking place in CVD process lead to natural convection and concentration diffusion which interact with forced convection and complex reactor geometries.
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