本发明涉及具有双装载选项的带电粒子光学系统。
The invention relates to a charged-particle optical system with dual loading options.
证明ad方法对带电粒子光学系统的像差分析是极其有效的。
It is concluded that AD method is a rather effective tool for the aberration analysis of charged particle optical systems.
该带电粒子光学系统具有装载器（106），该装载器具有可移入和移出空间的一部分（108）。
The microscope has a loader (106) with a part (108) that is moveable into and out of the space.
新闻报导被仔细在强烈的带电粒子束的物理学和他们的形成和集中的光学系统的设计之间平衡。
The coverage is carefully balanced between the physics of intense charged-particle beams and the design of optical systems for their formation and focusing.
新闻报导被仔细在强烈的带电粒子束的物理学和他们的形成和集中的光学系统的设计之间平衡。
The coverage is carefully balanced between the physics of intense charged-particle beams and the design of optical systems for their formation and focusing.
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