本文将围绕IC装备制造领域所面临的实际问题，开展用于扫描的高加速度高精度的宏动直线电机的研究工作。
This article will focus on the practical problems faced by the areas of IC manufacturing equipment, research high-acceleration and high-precision linear motor for scan.
本文将围绕IC装备制造领域所面临的实际问题，开展用于扫描的高加速度高精度的宏动直线电机的研究工作。
This article will focus on the practical problems faced by the areas of IC manufacturing equipment, research high-acceleration and high-precision linear motor for scan.
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