除了应用于单晶薄膜,该方法还可以应用于高质量的多晶薄膜的制备。
Said invented method not only can be used for preparing monocrystal film, but also can be used for preparing high-quality polycrystalline film.
而且通过调节工艺参数,可制备出沿不同晶向择优生长的多晶金刚石薄膜。
Moreover, by adjusting the technological parameters, polycrystalline diamond films grown preferentially along the different crystal orientations can be prepared.
最后,采用PC1D电池模拟软件对高温路线制备的多晶硅薄膜电池进行了理论模拟。
At last, we use the PC1D program to simulate polycrystalline silicon thin film solar cells prepared under high temperature.
着重研究了沉积工艺条件对多晶硅薄膜压阻灵敏度系数的影响。
The effect of thin film piezoresistive property related with deposit condition on polycrystalline silicon is studied.
本文介绍了半导体器件中的优质多晶硅薄膜的生长以及在生长多晶硅薄膜的同时怎样来监控淀积温度;
This paper introduces how to produce high quality polysilicon film in the semiconductor devices and how to monitor the deposition temperature at the same time when film grows.
结果表明,复合结构由普通多晶金刚石薄膜和纳米金刚石薄膜组成,薄膜的表层结构体现了纳米金刚石的特征。
The result shows that the surface of composite film is very smooth, and the dielectric properties are close to the conventional polycrystalline diamond films.
阐述了多晶硅薄膜太阳能电池的结构、特点,以及多晶硅薄膜的制备方法,并展望了多晶硅薄膜电池的发展趋势和前景。
The structure and features of the captioned cell and the preparation of the thin film are described. The developing trend and prospects of the cell are predicted.
利用原子力显微镜、二次离子质谱分析仪和探针,对多晶硅薄膜的高温退火特性进行了实验研究。
An experiment was conducted to study the high-temperature annealing characteristics of polysilicon films using atomic force microscope, secondary ion mass spectroscopy and probe.
多晶硅薄膜良好的压阻特性使其在MEMS压阻式传感器中得到了广泛应用。
Polysilicon films, due to its favourable piezoresistive properties, have been widely applied in MEMS piezoresistive sensors.
另外,随着热丝与衬底间距的增大,沉积出的多晶硅薄膜样品的晶化率明显减小,薄膜的晶粒尺寸也相应减小。
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
文章研究了用来作为多晶硅薄膜太阳电池衬底的陶瓷硅材料的制备方法及其结构。
In this paper, we have studied a preparation and structure of ceramic silicon sheets for substrate of poly-Si thin film solar cells.
实验结果表明:多晶硅薄膜的晶粒界面态和硅离子注入后多晶硅薄膜的晶粒组成结构是密切相关的。
The results show that the properties of grain-boundary states in recrystallized polysilicon films sharply depends on the crystallographic structure of the films.
薄膜均为多晶锐钛矿结构。
研究了陶瓷衬底上多晶硅薄膜的生长和区熔再结晶。
In this paper, growth and recrystallization of silicon films on ceramic substrates were studied.
单晶硅和多晶硅体太阳能电池成本居高不下,非晶硅和非晶硅薄膜太阳能电池又有光致衰退效应的困扰。
The cost of crystalline silicon and polycrystalline silicon solar cell is high steadily, amorphous silicon and amorphous silicon thin film solar cell has "optical-induced degradation".
采用水基凝胶流延工艺制备四方多晶氧化锆薄膜,确定合理的烧成制度,并考察薄膜的显微结构与烧结性能。
The present work was to determine the optimum sintering system and properties of the nanometer tetragonal polycrystalline zirconia green body by the aqueous gel tape casting process.
简要介绍了多晶硅薄膜晶体管的结构、器件特性以及在有源矩阵液晶显示器中的应用。
In this paper, the structure, properties of polycrystalline silicon thin film transistor were explained, and its application in the active matrix liquid display device was described.
采用热丝化学气相沉积法(HFCVD)在普通玻璃衬底上低温沉积多晶硅薄膜。
Polycrystalline silicon thin films were prepared by hot-filament chemical vapor deposition (HFCVD) on glass at low-temperatures.
采用在硅上磁控溅射金属钛膜再热氧化的工艺制备了多晶氧化钛薄膜。
Polycrystalline titanium oxide films are fabricated on silicon by thermally oxidizing titanium.
从简化步骤、降低成本的角度出发,采用快速热化学气相沉积(RTCVD)法在低纯颗粒带硅(SSP)衬底上制备出了多晶硅薄膜太阳电池。
Polycrystalline silicon thin film solar cell by RTCVD on SSP substrate is prepared so as to simplify the process and lower the cost.
借助台阶仪、X射线衍射(XRD)、扫描电镜(sem)等手段对颗粒硅带及多晶硅薄膜进行了表面轮廓、结晶质量和微观形貌的表征。
The surface profiles, micro-morphologies and crystal quality of SSP ribbon and Poly-Si film were then investigated by the step profiler, XRD (X-ray Diffraction) and SEM (Scanning Electron Microscopy).
确认了改善器件自加热退化的有效途径,同时有助于揭示多晶硅薄膜晶体管自加热退化的内在机制。
This study is useful for understanding the mechanism of self-heating degradation, and to find approaches to effectively alleviate the SH effect in device operation.
根据这种方法,我们研究了氢等离子体处理对多晶硅薄膜晶体管禁带态密度的影响。
With this method, the influences of the plasma hydrogenation on the gap state density have been investigated.
文章还从实验和理论上分析了影响多晶硅薄膜生长速率的因素。
According to the theory and the experiment mentioned in this paper, the factors which effect the growth rate of polysilicon film have been analysed.
本文回顾了现阶段液晶显示器的几个研究热点,包括透反射液晶显示器、多晶硅薄膜晶体管技术及硅基液晶。
In this paper, we reviewed several hotspots of LCD research, including Transparent LCD (TS-LCD), poly-silicon thin film transistor, liquid crystal on silicon (Lcos).
本文主要研究陶瓷衬底上多晶硅薄膜太阳电池的制备。
The fabrication of poly-crystalline silicon thin film solar cell on ceramic substrates is studied in this thesis.
本文概述了国际上制备多晶态氮化铜薄膜的研究进展及其物理性能,并对其应用前景进行展望。
This paper reviews the progress in synthesizing polycrystalline copper nitride film and its experimental results. And the prospects for the potential applications are also presented.
提出了一种表面修饰的金属诱导晶化方法,以稳定地获得晶粒尺寸均匀的多晶硅薄膜。
To obtain poly-Si with good uniformity and stability, a new method of solution-based metal-induced crystallization (S-MIC) with surface-embellishment was proposed in this paper.
SCYO薄膜为钙钛矿结构的多晶体。
SCYO layers were also Polycrystalline with the Perovskite structure.
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