详细研究了利用硅的各向异性腐蚀、各向同性腐蚀制备硅锥阴极阵列的工艺。
A technique for the fabrication of silicon cone cathode array by using anisotropic and isotropic etching has been reported in this paper.
详细研究了利用硅的各向异性腐蚀、各向同性腐蚀制备硅锥阴极阵列的工艺。
A technique for the fabrication of silicon cone cathode array by using anisotropic and isotropic etching has been reported in this paper.
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