介绍了一种新型的利用激光驱动的可变形反射镜。
This paper presents a novel deformable mirror driven by a laser.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
同时基于光传输理论，对可变形反射镜所具有的光调制能力进行了模拟。
According to the transmitting theory, the light modulation ability is simulated for this mirror.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
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