微机械陀螺常见的检测方式有电容式和压阻式。
Among the developed micromachined gyros, capacitive detection method is frequently used.
文摘：提出一种可消除热零点漂移的压阻式压力传感器。
Abstract: a pressure sensor which can cancel thermal zero shift is described.
目的建立非接触生命参数检测系统与压阻式加速度之间的数学模型。
AIM To construct the mathematical model between the non contact detecting system for life parameters and piezoresistive acceleration sensor.
我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型。
We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
阐述了用于冲击波超压测量的压阻式高频动态压力传感器的设计与开发。
This paper introduced the design and development of silicon piezoresistive high frequency dynamic pressure sensor which used in the measurement of shock wave superpressure.
硅压阻式传感器是一种新型压力传感器，它具有体积小，频响高等优点。
Silicon piezoresistance transducer is a new type pressure sensor which has smaller size, higher frequency response and other advantages.
多晶硅薄膜良好的压阻特性使其在MEMS压阻式传感器中得到了广泛应用。
Polysilicon films, due to its favourable piezoresistive properties, have been widely applied in MEMS piezoresistive sensors.
第三章详细阐述了压阻式加速度传感器的制作工艺，包括芯片工艺和盖板工艺。
The structure and dimension of the sensor were designed in this chapter. In chapter 3, the process of sensors is elaborated, the sensing element and cover board .
此芯片集成化程度较高，可以补偿硅压阻式压力传感器的温度误差和非线性误差。
It is mainly used to compensate temperature shift and non-linearity error of piezoresistive pressure sensor.
本文以压阻式加速度计为例，探讨了其动态特性对无陀螺微惯性测量组合的影响。
The dynamic characteristics of accelerometers working on gyro free micro inertial measurement units was discussed, with a piezoresistive accelerometer as an example.
基于硅压阻式传感器的工艺过程与后续电路设计，讨论了减小其温度影响的措施。
Based on the fabrication process of silicon piezoresistive sensors and the design of subsequent conditioning circuit, the measures for reducing the temperature effects on the sensors were discussed.
介绍了一种用压力一温度复合传感器对硅压阻式压力传感器温度特性的补偿方法。
A compensate method of piezoresistive pressure sensor temperature characteristic is introduced by using a pressure - temperature complex sensor.
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
利用ZMD31020传感器信号处理器，实现了硅压阻式传感器的非线性及温度补偿。
The ZMD31020 is a special sensor signal processor optimized for piezoresistive sensor nonlinearity and temperature compensation.
通过使用压阻式谐振器，可以避免需要使用外部晶体，这允许更大的集成以及使成本更低。
By using piezoresistive resonators the need for an external crystal can be avoided, enabling greater integration and lower costs.
本文对压阻式振动角加速度传感器的惯性变换系统的结构特性、工作原理进行了分析讨论。
The paper aims at discussing structural performance and operation principle of inertial transform system for vibration angular acceleration transducer of compressive resistance.
升力检测系统包括基于压阻式升力传感器的检测元件和基于PAC的数据采集及记录的控制系统。
The lift measurement system includes lift sensor and data collecting and analyzing control system based on PAC (PC based PLC).
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
在金属圈内滴封包封胶，填充在硅压阻式压力传感器的四周，隔 绝传感器芯片与外界环境的接触。
Sealing gel is dripped into the metal ring and filled around the silicon piezoresistive pressure sensor, so as to isolate the chip of the sensor from the outside environment.
SCX05DN压力传感器是SCX系列传感器中的一种典型的带温度补偿的集成电路压阻式压力传感器。
The SCX05DN pressure sensor is one of the SCX series sensors that is a typical integrated circuit piezoresistive pressure sensor with temperature compensated.
利用硅压阻式力传感器测量液体的表面张力系数，改变了传统测量微小拉力的方法，实现了非电量的电测。
Measuring the liquid surface tension coefficient by piezoresistive force sensor can change the traditional measuring method and achieve nonelectric testing.
传感器在生产和生活的各个方面应用广泛，而半导体压阻式传感器以其优越的性能成为现代测试领域的主角。
The sensor is widely used in every aspect of production and life, and semiconductor piezoresistive sensor has become the main role in the modern test due to its good performance.
压强的测量采用半导体硅压阻式压强传感器，通过测量MPT进气管路的静压，结合理论分析计算得到MPT谐振腔的总压。
The measurement of pressure was carried out by using semiconductor silicon piezometer. With the static pressure in inlet of pipeline and theoretic analysis we could get the total pressure of MPT.
采用了基于MEMS技术的硅压阻式压力传感器SP12作为轮胎压力的检测单元，PIC16F628A作为信号控制处理与发射单元。
A silicon piezoresistive pressure sensor based on MEMS technology SP12 is applied to be a unit in the tire pressure monitoring.
介绍了热线式、超声波式、硅压阻固态正交式三类测风传感器，并对这三类测风传感器的性能进行了比较。
This paper introduces hot wire, ultrasonic and silicon piezoresistive solid orthogonal wind sensors, and compares the performance of the three wind sensors.
介绍了桥式硅压阻器件的工作原理、性能指标和工作特点。
The principle, specifications and performance of the silicon piezoresistive element are presented.
基于MEMS技术和SOICMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。
This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.
基于MEMS技术和SOICMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。
This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.
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