我们用该方法计算了硅压阻式加速度传感器五阶梯硅梁固频和振型。
We calculated the natural frequencies and mode of vibration for a five stepped Si-beam of Si-piezoresistive accelerometer.
第三章详细阐述了压阻式加速度传感器的制作工艺，包括芯片工艺和盖板工艺。
The structure and dimension of the sensor were designed in this chapter. In chapter 3, the process of sensors is elaborated, the sensing element and cover board .
第二章详细论述了一种新型的微梁直拉直压硅微机械压阻式加速度传感器的工作原理。
In Chapter 2, the operation scheme of a micromachined piezoresistive accelerometer with axially deformed tiny beams is studied in details.
本文对压阻式振动角加速度传感器的惯性变换系统的结构特性、工作原理进行了分析讨论。
The paper aims at discussing structural performance and operation principle of inertial transform system for vibration angular acceleration transducer of compressive resistance.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
硅微机械加速度计作为一种可以测量加速度的传感器，可分为压电式、隧道式、压阻式和电容式等。
Silicon micro-accelerometer can measure the acceleration of the movement, and there are many kinds of Micro-accelerometer based on piezoelectric, tunnel, piezoresistive, capacitive effect.
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