根据设计的单轴电容式微加速计分析了微加速计的建模方法以及加速度计性能指标与设计参数之间的数学关系。
According the designed single axis micro accelerometer, its modeling means is presented. The relations between its design parameters and its performance index are analyzed.
根据设计的单轴电容式微加速计分析了微加速计的建模方法以及加速度计性能指标与设计参数之间的数学关系。
According the designed single axis micro accelerometer, its modeling means is presented. The relations between its design parameters and its performance index are analyzed.
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