第四章介绍了激光LIGA光刻实验装置的总体设计以及各单元部件的研制情况。

In chapter four, the system design of Laser LIGA Lithography Apparatus and unit design are introduced.

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第四章介绍了激光LIGA光刻实验装置的总体设计以及各单元部件的研制情况。

In chapter four, the system design of Laser LIGA Lithography Apparatus and unit design are introduced.

youdao