该方法克服了传统刀口扫描法的缺陷, 消除了由于离散型光学元件的离散性产生的空间非平移不变性的影响,减小了测量误差,提高了精确度。
The method avoids the influence of non-isoplanantic result from the dispersancy position between the edge and the array for measured MTF, and its precision was improved accordingly.
该方法克服了传统刀口扫描法的缺陷, 消除了由于离散型光学元件的离散性产生的空间非平移不变性的影响,减小了测量误差,提高了精确度。
The method avoids the influence of non-isoplanantic result from the dispersancy position between the edge and the array for measured MTF, and its precision was improved accordingly.
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