第三章给出了等截面悬臂梁微开关的微机械加工工艺，设计了掩膜版及具体的工艺参数。

Chapter three: Presents the fabrication process of micro-switch with cantilever beam and designed the masks.

youdao

第三章给出了等截面悬臂梁微开关的微机械加工工艺，设计了掩膜版及具体的工艺参数。

Chapter three: Presents the fabrication process of micro-switch with cantilever beam and designed the masks.

youdao