结果表明，膜厚分布的计算值与实测值符合的很好，并比较了不同气压、靶片距对淀积粒子能量和入射角分布的影响。
The simulation result of thickness distribution is in keeping with the measurement. The effects of sputtering condition on the distribution of thickness, energy and incident angle are also studied.
结果表明，膜厚分布的计算值与实测值符合的很好，并比较了不同气压、靶片距对淀积粒子能量和入射角分布的影响。
The simulation result of thickness distribution is in keeping with the measurement. The effects of sputtering condition on the distribution of thickness, energy and incident angle are also studied.
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