本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
对光学系统输出刀口像的一阶导数做傅里叶变换，可以得到该系统的光学传递函数（OTF）。
The OTF (Optical Transfer Function) of an optical system can be evaluated by the Fourier Transform of the first derivative of the optical image of an knife-edge (object).
给出了光学系统图、纵向像差图及调制传递函数图。
The figures of optical system, longitudinal aberration and modulation transfer function (MTF) are given.
光学图像在光学系统中传递的质量可以用调制传递函数评价。
Modulation transfer function can be used for evaluating the quality of optical pictorial transfer in optical systems.
从光线矩阵元表达的衍射积分出发，导出了复杂光学系统的光学传递函数。
Starting from the diffraction integration in terms of ray matrix elements, the optical transfer functions have been derived for complicated optical system.
衡量光学系统成像质量的主要方法有星点法、分辨率法、光学传递函数法等。
There are many ways to judge an optical system's imaging quality, such as star test, resolution test, optical transfer function (MTF), and so on.
刀口法是测量光学系统的传递函数一种基本方法，通过对刀口边缘误差建立数学模型，讨论刀口误差对光学传递函数测量精度的影响。
Using a knife edge to measure the MTF of optical system is a basic way. The paper discusses the influence of slit edge error on MTF by building a mathematical model.
全面测量光学系统像质的是它的点扩散函数(PSF)或光学传递函数(otf)。
The most complete measures of image quality for an optical system were its point spread function (PSF) and its optical transfer function (OTF).
调制传递函数是评价光学成像系统成像质量的重要方法，因而测量光学系统的调制传递函数在各种成像光学系统生产实践中具有相当重要的作用。
Modulation transfer function is a common method for evaluating the performance of optical imaging system. The measurement of MTF is very important in production and testing.
然后说明视频式光学传递函数测量仪组成和功能，重点给出其光学系统的设计。
Then the constitution and function of our video OTF instrument are specified. Its optical layout design is put stress upon.
给出了完整的椭球形窗口光学系统的设计，设计结果表明，系统的调制传递函数在整个扫描视场范围内接近衍射极限。
A complete design example of elliptical window optical system is demonstrated and the results show that the MTF of optical system approaches the diffraction limit across the entire scanning field.
给出了完整的椭球形窗口光学系统的设计，设计结果表明，系统的调制传递函数在整个扫描视场范围内接近衍射极限。
A complete design example of elliptical window optical system is demonstrated and the results show that the MTF of optical system approaches the diffraction limit across the entire scanning field.
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